Research on the Interaction Between KATON Perfluoroelastomer (FFKM) and Silane Coupling Agent (O-Si-O)
Research Manager: K.Y. Fan
Section 1: Research Motivation
Application validation of KATON’s new polymer-filled perfluoroelastomer (FFKM) and silane coupling agent (O-Si-O).
Section 2: Research Objective
What is the impact of the silane coupling agent (O-Si-O) on the strength of perfluoroelastomer (FFKM)?
Section 3: Research Scope
Traditional Carbon Black Filling Technology (C-F-C)
Development History: 1965 to Present
Traditionally, carbon black N990 has been selected as the reinforcing filler in the perfluoroelastomer (FFKM) industry due to its high affinity with FFKM raw rubber. This allows for easy crosslinking without modification, effectively reinforcing the physical strength and mechanical properties (such as hardness, tensile strength, elongation, modulus), wear resistance, oil resistance, and filler dispersion in FFKM compounds.
However, carbon black is black, which has caused contamination issues in semiconductor equipment due to the release of black FFKM fillers during use. As a result, this technology has gradually fallen out of favor in recent years.
Silane Coupling Technology (C-F-O-Si-O)
Development History: 1990 to Present
Around 1990, most FFKM seal manufacturers began shifting from black to white polymer fillers. White or colored compounds often use light-colored powders such as clay, calcium hydroxide, talc, and silica as fillers, but their compatibility with FFKM is unsatisfactory. Thus, silane coupling agents (O-Si-O) are introduced into these composite materials to create crosslinking between the inorganic fillers and FFKM through physical and chemical reactions.
Silane coupling agents enhance the affinity between these materials, increasing the value of FFKM products by improving mechanical performance (such as hardness, tensile strength, elongation, modulus), wear resistance, filler dispersion, and processing ability. However, while this technology is widely used due to its low cost and high performance in organic solvent and chemical environments, it also has drawbacks. FFKM with fillers such as carbon, barium, titanium, aluminum, magnesium, calcium, and zinc may release gases (outgassing) when exposed to plasma, ozone, or chemical solvents, leading to contamination in manufacturing processes.
Polymer Filling Technology (C-F)
Development History: 2021 to Present
In recent years, the semiconductor industry has advanced to the 2nm generation, drawing attention to low-emission materials. KATON® polymer-filling technology uses a special formula with highly dispersed liquid fluoropolymers, which enhances the material without the need for traditional carbon black or mineral fillers. This proprietary curing system eliminates the need for silane coupling agents and is specifically designed for etching and chemical vapor deposition (CVD) processes, reducing particle contamination and maintaining sealing integrity in corrosive plasma environments.
Section 4: Conclusion
Can silane coupling agents (O-Si-O) be added to this new polymer-filling technology (C-F) for FFKM? Technically, the answer is yes, but it offers no significant physical or chemical performance benefits, rendering it unnecessary for this new polymer-filling technology.
Appendix
KATON Polymers Research and Development Department
Research Title: Study on the Interaction Between KATON Perfluoroelastomer (FFKM) and Silane Coupling Agent (O-Si-O)
Report Date: November 29, 2022Research Manager: K.Y. Fan